Rapid Thermal Processing Of High Temperature Superconducting Fiber

Temperature Control and Modeling of Rapid Thermal Processing

Modeling and temperature control of rapid thermal processing

In the past few years, Rapid Thermal Processes (RTP) have gained acceptance as mainstream technology for semi-conductors manufacturing. These processes are characterized by a single wafer processing with a very fast ramp heating of the silicon wafer (up to 200C/sec). The single wafer approach allows for faster wafer processing and better control of process parameters on the wafer. As feature si...

Thermal Model of Rapid Thermal Processing Systems

Continuously shrinking device parameters and the enlargement of wafer diameters in semiconductor industry require best temperature homogeneity in Rapid Thermal Processing (RTP). This together with the requirement of high ramp rates in the range of 200 °C s as advantageously used in ultra shallow junction processes [1] challenges temperature control in RTP technology. In order to design advanced...

Temperature Measurement in Rapid Thermal Processing Using the Acoustic Temperature Sensor - Semiconductor Manufacturing, IEEE Transactions on

Acoustic techniques are used to monitor the temperature of silicon wafers in rapid thermal processing environments from room temperature to 1000" C with f 5 " C accuracy. Acoustic transducers are mounted at the bases of the quartz pins that support the silicon wafer during processing. An electrical pulse applied across the transducer generates an extensional mode acoustic wave which is guided b...

Superconducting properties of copper oxide high - temperature

The equations for the magnon pairing theory of high-temperature copper-oxide-based superconductors are solved and used to calculate several properties, leading to results for specific heat and critical magnetic fields consistent with experimental results. In addition, the theory suggests an explanation of why there are two sets of transition temperatures (T, 90 K and Tc 55 K) for the YBa2Cu306+...